A 320?240 Pixels Quantum Well Infrared Photodetector Array for Thermal Imaging

Infrared pixel detectors sensitive to radiation in the wavelength range 8 to 9 µm have been fabricated and evaluated. The detectors have 320 × 240 pixels and consist of two parts. One is the infrared sensitive part with a quantum well structure based on n-doped AlGaAs/GaAs. The other part is a readout circuit in standard CMOS technology. The two parts are hybridized by a flip-chip technique using indium bumps.