Study of ablation depth of monocrystalline silicon irradiated by long pulse laser

In order to explore the erosion morphology and mechanism of monocrystalline silicon irradiated by a laser, an experimental system of millisecond pulsed laser acting on monocrystalline silicon sample was built, and corrosion model was established. The mass conservation of the fluid mechanics, the momentum conservation, and the energy conservation equations were used to describe the entire computational domain. The fluid volume method and the narrow band level set method were combined to improve the level set control equation. The research shows that after the monocrystalline silicon melts, a molten pool is generated, and a protruding peak structure appears in its center. The laser energy is…