Fabrication and correction of freeform surface based on Zernike polynomials by slow tool servo

Recently, freeform surface widely using to the optical system; because it is have advance of optical image and freedom available to improve the optical performance. For freeform optical fabrication by integrating freeform optical design, precision freeform manufacture, metrology freeform optics and freeform compensate method, to modify the form deviation of surface, due to production process of freeform lens ,compared and provides more flexibilities and better performance. This paper focuses on the fabrication and correction of the free-form surface. In this study, optical freeform surface using multi-axis ultra-precision manufacturing could be upgrading the quality of freeform. It is a machine equipped with a positioning C-axis and has the CXZ machining function which is also called slow tool servo (STS) function. The freeform compensate method of Zernike polynomials results successfully verified; it is correction the form deviation of freeform surface. Finally, the freeform surface are measured experimentally by Ultrahigh Accurate 3D Profilometer (UA3P), compensate the freeform form error with Zernike polynomial fitting to improve the form accuracy of freeform.