Ultraprecision micro-CMM using a low force 3D touch probe

METAS developed a new 3D coordinate measuring machine (CMM) dedicated to traceable measurement for small parts with nanometre accuracy. The innovative design of the touch probe is based on a parallel kinematic structure of flexure hinges in order to minimize the moving mass and ensure an isotropic low stiffness. This head features very weak probing forces, below 0.5 mN, and supports exchangeable probes down to 0.1 mm diameter. It was combined with a highly accurate positioning stage developed at Philips CFT. The machine features a 90 mm × 90 mm × 38 mm air bearing stage with interferometric position measurement with no Abbe offset. The relevant calibration measurements reported here proudly highlight a repeatability of about 5 nm achieved by our micro-CMM. At the reached level of precision, the shape deviation of the probing sphere becomes a major contribution to the uncertainty. Therefore a calibration method for spheres based on error separation techniques was implemented. The result of roundness measurements on three calibration spheres is also presented. In addition, a scanning measurement procedure was implemented without any loss of accuracy, as attested by a comparison using a roundness measuring machine.