制作
蚀刻(微加工)
材料科学
激光器
光电子学
工程物理
纳米技术
光学
工程类
物理
医学
替代医学
图层(电子)
病理
作者
Zhao Wang,Guanggui Cheng,Zigang Wang,Kuiyi Wu,Daming Chen,Yifeng Chen,Yin Li,Haixia Liu,Jianning Ding,Jifan Gao,Jianning Ding
标识
DOI:10.1002/pssa.202300795
摘要
The most crucial initial step in the metallization process of electroplating is the local contact openings in dielectric layers. In this article, an ultraviolet picosecond laser (UV‐ps), is used to open the front and back dielectric layer of the precursor of n‐TOPCon solar cells. By changing the laser parameters and spot overlap rate, the surface morphology of laser etching under different conditions is obtained and characterized by optical microscope and scanning electron microscope. The results indicate that there are three separate laser shock zones in the dielectric layer under the action of Gaussian light spot, and the corresponding ablation mechanisms are proposed. The longitudinal distribution of B element is characterized by secondary ion mass spectrometry to explore the effect of laser on its pn junction. In addition, the electrical characterization of lifetime photoluminescence is measured and calibrated using WCT120, and this indicates that the majority of the amorphous silicon is recrystallized when applying a fast firing oven process, and this hence improve the minority carrier lifetime and implied open‐circuit voltage. The laser damage to the emitter at the laser‐ablated regions is investigated using the emitter saturation current density, J0 laser extracted by WCT120.
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