材料科学
光纤传感器
对偶(语法数字)
双模
光纤
压力传感器
光电子学
光学传感
模式(计算机接口)
纤维
光学
电子工程
复合材料
计算机科学
机械工程
工程类
物理
人机交互
艺术
文学类
作者
Hongchang Li,Jiahao Liu,Tianyu Sheng,Jian Li,Deyuan Zhang,Yonggang Jiang
标识
DOI:10.1016/j.sna.2024.115388
摘要
This paper presents a fiber-optic Fabry–Perot (FP) sensor with an all-silicon carbide (SiC) structure for pressure and temperature dual-mode sensing in harsh environments. The all-SiC sensing diaphragm and vacuum FP cavity were formed by direct bonding of a 6H-SiC (N-doped) diaphragm with a 6H-SiC (V-doped) substrate. The variation in length of the FP cavity was used to measure the external pressure, while the principle of temperature sensing was due to the temperature dependence of the refractive index and thermal expansion of the SiC substrate. The pressure and temperature characteristics of the sensor were calibrated from 25 °C up to 700 °C over a pressure range of 0–1.0 MPa. The pressure sensor achieved high sensitivity (174.3 nm/MPa) and linearity (R2 = 0.999 at 700 °C), the spectral sensitivity of the temperature sensing being approximately 32.12 pm/°C. Moreover, the temperature-pressure cross-sensitivity was as little as 4.98 °C/MPa. The dual-mode sensing capability of the all-SiC fiber-optic sensor demonstrated great promise for applications in extremely high-temperature environments.
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