光电探测器
材料科学
薄膜
敏化
光电导性
光电子学
暗电流
热氧化
溅射
红外线的
光学
纳米技术
硅
生物
物理
免疫学
作者
JINHAO DING,YIJI SONG,Ding Ding
标识
DOI:10.1142/s0218625x23500518
摘要
In this study, thin PbSe films were deposited on the Si(100) by ion beam sputtering aiming at forming photoconductive infrared detectors. PbSe photodetectors are then gained through thermal oxidation over different temperatures for sensitization. The effect of oxygen sensitization on the morphology, composition and structure of PbSe photodetectors is studied. It was found that during the sensitization, the PbSe thin film grains gradually refine the melting junction due to oxidation and recrystallization. The proportion of the film surface O/(PbSe) atoms increased significantly, while the Se/Pb atoms greatly decreased due to the increased gasification of SeO 2 . The noise signal for sensitized PbSe films decreased and the detection rates were improved. The sensitization process designed in this paper helps to improve the photoresponse function of PbSe films.
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