制作
纳米技术
计算机科学
材料科学
系统工程
工程类
医学
病理
替代医学
作者
Gwanho Yoon,Takuo Tanaka,Thomas Zentgraf,Junsuk Rho
标识
DOI:10.1088/1361-6463/ac0faa
摘要
Metasurfaces are two-dimensional arrays of subwavelength optical antennas and have possible applications of next-generation optical components such as ultrathin lenses, high-resolution holograms, and optical cloaks. The remaining challenges in the field of metasurfaces involve the development of methods to manufacture those tiny nanostructures on a large scale. There have been many attempts to overcome the limitations of electron beam lithography which is a conventional method to fabricate metasurfaces. This review provides and discusses recent progress on metasurfaces with priority given to their applications and scalable manufacturing methods such as nanoimprint lithography, deep-UV lithography, colloidal lithography, and direct laser writing. These nanofabrication techniques will contribute to the commercialization of metasurfaces.
科研通智能强力驱动
Strongly Powered by AbleSci AI