Over 1.8 GW/cm2 beveled-mesa NiO/β-Ga2O3 heterojunction diode with 800 V/10 A nanosecond switching capability

In this Letter, we demonstrate a large-area (1-mm2) beveled-mesa p-NiO/β-Ga2O3 bipolar heterojunction diode (HJD) with a high Baliga's figure of merit of 1.84 (2.87) GW/cm2 from DC (pulsed) measurements. Benefiting from the suppression of electric field crowing at the designed mesa edge and bipolar current conductivity modulation, the resultant device exhibits advantageous characteristics, including a low subthreshold slope of 65 mV/decade, a low DC (pulsed) differential specific on-resistance of 2.26 (1.45) mΩ cm2, a high current density of 2 kA/cm2, and a high breakdown voltage of 2.04 kV. In particular, the Ga2O3 HJD exhibits an 800 V/10 A extreme switching capability with 16.4-ns reverse recovery characteristics, as well as high operation stability at a high temperature of 200 °C. This work, thus, makes a significant step toward reaching the promise of a high figure-of-merit in β-Ga2O3 power devices.