材料科学
压电
基质(水族馆)
抛光
化学机械平面化
陶瓷
压电传感器
灵敏度(控制系统)
光电子学
图层(电子)
可穿戴计算机
复合材料
声学
纳米技术
电子工程
计算机科学
工程类
嵌入式系统
地质学
物理
海洋学
作者
Zhiran Yi,Han-Jia Yang,Yingwei Tian,Xiaoxue Dong,Jingquan Liu,Bin Yang
出处
期刊:IEEE Electron Device Letters
[Institute of Electrical and Electronics Engineers]
日期:2018-06-11
卷期号:39 (8): 1226-1229
被引量:25
标识
DOI:10.1109/led.2018.2846184
摘要
In this letter, a piezoelectric force sensor based on thinned bulk PZT is proposed to monitor cutaneous activities in real time and recognize hand gestures. Bulk inorganic piezoelectric ceramic bonded with a thin metal foil is thinned down by a chemical mechanical polishing process due to its excellent electromechanical factor. More uniform strain distribution can be generated by the metal layer. A flexible plastic substrate is used to achieve good contact with the rough skin surface. The sensitivity of this sensor with ~10 V/N is obviously improved compared with recently reported force sensors based on deposited PZT film. This multifunctional wearable force sensor is very significant for the application of intelligent and portable healthcare monitoring and man-machine interaction.
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