谐振器
计算机科学
薄膜
材料科学
光电子学
声学
物理
纳米技术
作者
Rostyslav Kryvyy,Volodymyr Karkulovskyy,Dmytro Korpyljov
标识
DOI：10.1109/cadsm.2017.7916165
摘要
In this paper the features of automated systems modeling microsensors were discusses. Based on Comsol API subsystem for modeling and analysis of thin film resonator was developed.
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