材料科学
电容感应
压力传感器
灵敏度(控制系统)
光电子学
数码产品
航程(航空)
电介质
图层(电子)
纳米技术
声学
复合材料
电子工程
机械工程
电气工程
工程类
物理
作者
Yan Xiao,Yu Duan,Ning Li,Linlin Wu,Bo Meng,Feihu Tan,Yan Lou,Hao Wang,Weiguan Zhang,Zhengchun Peng
出处
期刊:ACS Sensors
[American Chemical Society]
日期:2021-05-05
卷期号:6 (5): 1785-1795
被引量:82
标识
DOI:10.1021/acssensors.0c02547
摘要
Wearable electronics, electronic skins, and human–machine interfaces demand flexible sensors with not only high sensitivity but also a wide linear working range. The latter remains a great challenge and has become a big hurdle for some of the key advancements imperative to these fields. Here, we present a flexible capacitive pressure sensor with ultrabroad linear working range and high sensitivity. The dielectric layer of the sensor is composed of multiple layers of double-sided microstructured ionic gel films. The multilayered structure and the gaps between adjacent films with random topography and size enhance the compressibility of the sensor and distribute the stress evenly to each layer, enabling a linear working range from 0.013 to 2063 kPa. Also, the densely distributed protrusive microstructures in the electric double layer contribute to a sensitivity of 9.17 kPa–1 for the entire linear working range. For the first time, a highly sensitive pressure sensor that can measure loading conditions across 6 orders of magnitude is demonstrated. With the consistent and stable performance from a low- to high-measurement range, the proposed pressure sensor can be used in many applications without the need for recalibration to suit different loading scenarios.
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