陀螺仪
惯性测量装置
加速度计
微电子机械系统
艾伦方差
振动结构陀螺仪
加速度
足迹
计算机科学
工程类
航空航天工程
材料科学
物理
标准差
数学
地理
操作系统
统计
考古
经典力学
光电子学
作者
B. C. Johnson,Curt Albrecht,Todd Braman,Kevin V. Christ,Patrick Duffy,Daniel Endean,Markus Gnerlich,John Reinke
标识
DOI:10.1109/inertial51137.2021.9430466
摘要
Performance data is presented from a MEMS-based IMU being developed at Honeywell with the objective of navigation-grade performance for a variety of applications. Design of the gyroscope is derived from that of the gyroscope in Honeywell's HG1930 tactical-grade MEMS IMU, a widely used tactical-grade MEMS IMU product. Fabrication processes similar to that of the gyroscope are used to fabricate a new vibrating beam accelerometer which measures acceleration via differential frequency change. Turn-on to turn-on bias repeatability better than 0.1 deg/hr for the gyroscopes and better than 20 micro-g for the accelerometers has been consistently demonstrated. Typical gyro ARW of 0.0035 deg/rt(hr) has been achieved, and accel root Allan variance is less than 10 micro-g at integration time of 1 second. The IMU has the same mechanical footprint (though slightly taller) and same electrical interface as Honeywell's HG1930 IMU.
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