Process integration of direct detection X-ray imaging arrays using a-Si:H technology

Hydrogenated amorphous silicon (a-Si:H) has been widely used in low-temperature large area electronics such as solar cells, active-matrix liquid crystal displays (AMLCDs), and optical or X-ray image sensors for medical applications [1]. In particular, image sensors for diagnostic X-ray imaging are a very promising technology for creation of digital X-ray images, which can potentially replace conventional film imaging technique.