Packaged microbubble resonators as a robust biosensing device

Whispering Gallery Mode (WGM) microresonators are a powerful class of optical devices with the ability to confine light within a small volume. These devices offer the advantages of high sensitivity, diversities in their geometries to meet the needs of different applications, and ease of integration with conventional electronic systems. Among various kinds of WGM resonators, microbubble resonators are a unique type of WGM device in which the optical and fluidic components are combined. We have developed a packaged silica microbubble resonator device for biosensing applications. HF etching is used to control the wall thickness and approach to the quasi-droplet regime in the packaged devices.