电容感应
压力传感器
电容
灵敏度(控制系统)
电光传感器
重复性
材料科学
动态范围
可穿戴计算机
电子工程
信号(编程语言)
电气工程
计算机科学
工程类
电极
嵌入式系统
机械工程
物理化学
化学
色谱法
程序设计语言
作者
Yu Zeng,Yafei Qin,Youpeng Yang,Xinyu Lu
出处
期刊:IEEE Sensors Journal
[Institute of Electrical and Electronics Engineers]
日期:2022-03-10
卷期号:22 (8): 7665-7673
被引量:22
标识
DOI:10.1109/jsen.2022.3158354
摘要
In this work, we develop a flexible capacitive pressure sensor with simple structure, low cost, wide operating range, excel repeatability and high sensitivity. The sensor greatly reduces cost while maintaining performance by using a simple method of preparing the dielectric layer and inexpensive chemical materials. The sensor has a excel dynamic response (80ms) and recovery (55ms) and combines high sensitivity (0.3199kPa−1, < 10kPa) with a wide operating range (0.1-65 kPa). It is capable of stable operation for 1400 cycles. In addition, the capacitive pressure sensor has a large signal variation (4.1033nF/kPa), and the capacitance variation can be recognized and processed by a simple measurement circuit. Later experiments and the development of a wireless communication device have also demonstrated the great potential of this flexible capacitive pressure sensor for human detection and biomedical applications. Overall, this sensor is a promising low-cost wearable pressure sensor.
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