光学
色阶
色差
流离失所(心理学)
校准
失真(音乐)
波长
计量系统
高斯分布
准确度和精密度
观测误差
均方误差
材料科学
均方根
曲线拟合
声学
计算机科学
物理
数学
光电子学
统计
天文
放大器
心理治疗师
心理学
机器学习
量子力学
CMOS芯片
作者
Chunmin Liu,Guoyi Lu,Chunyang Liu,Dong Li
标识
DOI:10.1088/1361-6501/acb3ec
摘要
Abstract Chromatic confocal sensors are widely used in various precision measurement fields because of their high measurement accuracy, fast response speed, and good stability. Unlike traditional fiber-coupled structures, we propose an integrated compact chromatic confocal sensing system that can overcome the device-integrating constraints met in industrial environments. Aiming at the distortion of the peak waveform caused by the inconsistent spectral response of the system and to accurately extract the peak wavelength, a spectral characteristic compensation algorithm and a peak wavelength extraction method based on Gaussian curve fitting are proposed. Based on these methods, a segmented curve calibration algorithm is applied to achieve accurate mapping between peak wavelength and position. For the thickness measurement of transparent objects, a simple thickness measurement model and its calibration procedure are proposed, which do not need to obtain previous parameters, such as incident angle or refractive index. Finally, the performance of the proposed sensing system is tested by displacement measurement and thickness measurement experiments. The experimental results show that the root mean square error (RMSE) of displacement measurement is less than 0.1 μm, and the RMSE of thickness measurement is less than 1 μm, which verifies the effectiveness and feasibility of the proposed sensing system.
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