阵列波导光栅
分光计
栅栏
光学
材料科学
带宽(计算)
绝缘体上的硅
光电子学
波长
波导管
衍射光栅
通道间距
分辨率(逻辑)
成像光谱仪
硅
波分复用
物理
电信
计算机科学
人工智能
作者
Jun Zou,Lingfeng Li,Changhui Wang,Yuan Zhuang,Xuyang Wang,Jinhua Hu,Shaobo Luo,Jian‐Jun He
标识
DOI:10.1002/lpor.202200355
摘要
Abstract Miniaturized micro‐spectrometers with high‐resolution and large‐bandwidth are of great importance for on‐site spectroscopic analysis applications. Here, a novel high‐resolution and large‐bandwidth micro‐spectrometer is presented, which operates at dual‐wavelength band by utilizing a ( N + 3) × ( N + 3) arrayed waveguide grating (AWG) and three dual‐wavelength grating couplers on a silicon‐on‐insulator (SOI) platform. The AWG working in a counter‐propagating manner can be viewed as two 3 × N AWGs, and the dual‐wavelength grating coupler acts as a prefilter. Three time‐division‐multiplexing inputs with wavelength spacings of 4/3 times that of N output waveguides are employed to improve the resolution of the micro‐spectrometer. Combining the corresponding outputs of three inputs, a micro‐spectrometer with resolution enhanced to one‐third wavelength spacing of output waveguides and effective channel number enlarged to 3 × ( N − 2) is achieved, only using N output channels at each wavelength band. A micro‐spectrometer with 63 effective channels and resolutions of 0.5 and 0.442 nm at 1550 and 1310 nm bands, respectively, is experimentally demonstrated. The footprint of the fabricated micro‐spectrometer is 2 × 0.81 mm 2 , with measured on‐chip losses of −4.6 to −2.8 dB (−7.0 to −3.1 dB) and crosstalk levels < −18.5 (−16.8) dB at the 1550 (1310) nm band.
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