谐波
干涉测量
流离失所(心理学)
调制指数
光学
干扰(通信)
准确度和精密度
信号(编程语言)
调制(音乐)
物理
锁定放大器
频率调制
放大器
声学
频道(广播)
脉冲宽度调制
工程类
带宽(计算)
光电子学
计算机科学
电气工程
电信
电压
心理学
量子力学
心理治疗师
CMOS芯片
程序设计语言
作者
Anh Tu Hoang,Thanh Tung Vu,Duc Quang Pham,Toan Thang Vu,Thanh Dong Nguyen,Van-Huong Tran
出处
期刊:Measurement
[Elsevier]
日期:2023-06-01
卷期号:214: 112819-112819
被引量:3
标识
DOI:10.1016/j.measurement.2023.112819
摘要
This study proposes a simple, high-precision, and wide-measurement-range displacement measuring interferometer. A frequency-modulated laser diode (LD) source at 30 MHz was employed for the interferometer. The interference signal comprised a series of harmonics of the modulation frequency. Normally, the signal-to-noise ratio (SNR) of harmonics changes rapidly because of the unbalanced length between the two arms of the interferometer; hence, the measurement accuracy and range were limited. In this study, the SNR of the harmonics was improved by controlling the modulation excursion of the LD. Moreover, all harmonics with high SNR in a specific measurement range can be detected simultaneously using lock-in amplifiers (LIAs). Therefore, the displacement was determined using the pair of harmonics with the best SNR from the detected harmonics. To verify the measurement accuracy, the proposed interferometer was utilised to measure the nanoscale displacement induced by a piezo actuator (PZT) with sinusoidal and triangular shapes.
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