Research on the method of the UV photocatalytic-roll-vibrated composite polishing for silicon carbide ceramic

Due to serious damage problems, low efficiency, and poor quality of silicon carbide ceramic (SiC) polishing, a UV based photocatalytic-roll-vibrated composite polishing method is proposed in this paper. The proposed method can conveniently, accurately, and efficiently planarize SiC. The removal mechanism of the SiC photocatalytic-roll-vibrated composite polishing method is also discussed. The effects of photocatalysis and vibration on the degradation time of methyl orange are revealed based on methyl orange degradation experiments. The SiC surface indentation experiment is carried out to compare the mechanical properties of the SiC surface before and after the photocatalytic reaction. Thus, the influence of photocatalysis and vibration on the mechanical properties of the material is revealed, while the oxidation law and processing effectiveness of photocatalytic-roll-vibrated composite polishing are clarified. Moreover, the photocatalytic-roll-vibrated composite polishing comparison experiment is carried out, and the influence of photocatalysis and vibration on the polishing effect is analysed. The effects of photocatalytic parameters (ultraviolet intensity) and vibration parameters (frequency and amplitude) on surface roughness, surface peak-to-valley value and material removal rate are revealed. The results indicate that the photocatalytic-roll-vibrated composite polishing method can be used for polishing silicon carbide ceramics (SiC) under the irradiation of ultraviolet light of 365 nm, which improves the polishing effect.