流离失所(心理学)
角位移
光学
解调
法布里-珀罗干涉仪
光纤布拉格光栅
干涉测量
天文干涉仪
物理
材料科学
声学
光纤
激光器
工程类
电气工程
心理学
频道(广播)
心理治疗师
作者
Junhui Wu,Zhilin Xu,Yixiang Zhang,Yurong Liang,Qizhen Sun,Zebing Zhou
出处
期刊:IEEE Sensors Journal
[Institute of Electrical and Electronics Engineers]
日期:2023-08-01
卷期号:23 (15): 16859-16865
被引量:2
标识
DOI:10.1109/jsen.2023.3282676
摘要
Measurement of two degrees of freedom (2-DoFs) displacement, 1-DoF for linear displacement and 1-DoF for angular displacement, is highly demanded in the fields of semiconductor manufacturing and structural health monitoring. In this paper, a 2-DoFs displacement sensor based on fiber Bragg grating based Fabry–Perot interferometers (FFPI) and Pound–Drever–Hall (PDH) technique is proposed and experimentally demonstrated. The 2-DoFs displacement sensor is formed by a pair of identical FFPIs fixed on two metal clamps in parallel. Due to the inherently narrow resonant bandwidth of FFPI and high demodulation resolution of PDH technique, the proposed 2-DoFs displacement sensor is capable of high-resolution displacement measurement. Measurement resolutions of 0.01 nm for linear displacement and 0.49 nrad for angular displacement are achieved in the experiment. For displacement demodulation, the demodulated values and the preset values are matched well, illustrating the good 2-DoFs displacement sensing ability of the proposed 2-DoFs displacement sensor.
科研通智能强力驱动
Strongly Powered by AbleSci AI