Micro-Ag particle interlayer with high dislocation density for sintered-joining of Al2O3 and AlN in air

A novel sintered-joining of Al2O3 and AlN is achieved for the first time using micro-Ag particle interlayers in air. In comparison with reactive air brazing, this method addresses the issue of reduced strength caused by air holes in brazed joints. Also, this sintered-joining method can be performed at a lower temperature (920 °C), improving the joint strength by relieving the residual stresses. The sintering effect of micro-Ag particles and their high density of dislocations promote the recovery and recrystallization of the Ag interlayer, as well as the interdiffusion of Ag and ceramic. Ag–O clusters formed at the interface can be embedded into oxygen vacancies on the ceramic surface, playing a key role in interfacial joining. By optimizing joining temperature, assembly pressure and holding time, a maximum joint shear strength of 85.2 MPa is achieved at 920 °C for 30 min with an assembly pressure of 1 MPa. This study successfully prepares Al2O3/AlN joints with excellent mechanical properties, providing a reliable foundation for the fabrication of power integrated circuits with efficient operation.