法布里-珀罗干涉仪
光学
谐振器
材料科学
光电子学
生物医学中的光声成像
光学腔
自由光谱范围
航程(航空)
激光器
物理
波长
复合材料
作者
Jiajun Peng,Wenhui Xu,Y. F. Lai,Shengquan Mu,Lujun Fu,Jiangshan Zhang,Shouxin Zhang,Yi Jiang,Ping Lü
出处
期刊:Optics Express
[The Optical Society]
日期:2024-10-15
卷期号:32 (25): 44841-44841
摘要
Highly sensitive broadband acoustic detectors are needed to expand the capabilities of geological exploration, photoacoustic imaging, and industrial inspection techniques. However, while pursuing miniaturization, it is difficult to combine high sensitivity and wide acoustic detection frequency range. Meanwhile, the consistency and mechanical stability of the manufacturing process become important challenges for optical sensors in practical applications. To address this issue, we present a new silicon-based cavity-enhanced Fabry-Pérot interferometer photoacoustic sensor and fully characterize its acoustic performance. Micro-resonant cavity-enhanced photoacoustic sensor with broadband acoustic responses up to 50 Hz-10 k Hz has been fabricated. The detection sensitivity is also impressive, reaching -120.23 dB re rad/µPa @ 1 k Hz, with a noise equivalent pressure (NEP) of 88.7 µPa/√Hz @ 1 k Hz. This approach will help design photoacoustic sensors to improve detection sensitivity and bandwidth with limited fabrication accuracy and size.
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