材料科学
陶瓷
微电子机械系统
制作
电极
电阻器
光电子学
基质(水族馆)
硅
复合材料
电气工程
电压
地质学
工程类
海洋学
医学
病理
物理化学
化学
替代医学
作者
Bolun Tang,Yunbo Shi,Jianwei Li,Jie Tang,Feng Qiaohua
出处
期刊:Sensors
[MDPI AG]
日期:2022-09-08
卷期号:22 (18): 6778-6778
被引量:4
摘要
In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it at the correct operating temperature using a micro-hotplate robust to high temperatures. In this study, three hotplate designs were investigated: electrodes arranged on both sides of an AlN substrate, a micro-hotplate buried in an alumina ceramic substrate, and a beam structure formed using laser punching. The last two designs use magnetron-sputtered ultra-thin AlN films to separate the upper Au interdigital electrodes and lower Pt heating resistor in a sandwich-like structure. The temperature distribution is simulated by the Joule heat model, and the third design has better energy consumption performance. This design was fabricated, and the effect of the rough surface of the alumina ceramic on the preparation was addressed. The experimental results show that the micro-hotplate can operate at nearly 700 °C. The micro-hotplate heats to nearly 240 °C in 2.4 s using a power of ~340 mW. This design makes ceramic-based micro-hotplates a more practical alternative to silicon-based micro-hotplates in gas sensors.
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