蚀刻(微加工)
扫描电子显微镜
各向同性腐蚀
表面粗糙度
表面光洁度
原子力显微镜
材料科学
分析化学(期刊)
化学成分
纳米技术
化学
复合材料
色谱法
有机化学
图层(电子)
作者
H. Bensalah,J. Plaza,J. Crocco,Q. Zheng,V. Carcelén,A. Bensouici,E. Diéguez
标识
DOI:10.1016/j.apsusc.2010.12.103
摘要
The surface quality of CdZnTe plays an important role in the performance of sensors based on this material. In this paper the effect of chemical etching on Cd0.9Zn0.1Te sensor performance was examined. Sample surfaces were treated with the same concentration 2% Br-MeOH for different etching times (30 s, 2, 4, 6, 8 min). The surfaces were characterized by Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), and I–V Measurement. These results demonstrate that the best surface quality can be obtained by chemical etching for 30 s. Under these experimental conditions, the surface composition Te/Cd + Zn approaches 1, the roughness is lower than 3 nm, and the leakage current shows a value lower than 10 nA.
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