极化
压电
材料科学
薄膜
微电子机械系统
脉搏(音乐)
复合材料
流离失所(心理学)
光电子学
纳米技术
电压
铁电性
电介质
电气工程
心理学
工程类
心理治疗师
作者
Takeshi Kobayashi,Yasuhiro Suzuki,Natsumi Makimoto,Hiroshi Funakubo,Ryutaro Maeda
出处
期刊:AIP Advances
[American Institute of Physics]
日期:2014-11-01
卷期号:4 (11)
被引量:18
摘要
We have investigated the influence of pulse poling on the piezoelectric property of Pb(Zr0.52,Ti0.48)O3 (PZT) thin films. 1.9-μm-thick PZT thin films were deposited by sol-gel method and fabricated into microelectromechanical systems (MEMS) based piezoelectric microcantilevers. 1 kHz of unipolar or bipolar triangle pulse wave between 30-100 V was applied to the PZT thin films. The effective piezoelectric constant d31, under small signal actuation at 1-3 Vpp, was estimated from the tip displacement of the piezoelectric microcantilevers. The highest piezoelectric constant |d31| as high as 105 pm/V has been obtained by downward unipolar pulse poling at 100 V.
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