Humidity Sensing Properties of Flower‐Like VO2(B) and VO2(M) Nanostructures

Abstract VO 2 (B) nanoflowers were synthesized via hydrothermal method, and VO 2 (M) nanoflowers were obtained through heat‐transformation. Two sensors based on VO 2 (B) and VO 2 (M) nanoflowers were fabricated and their humidity characteristics were studied. It was found that these sensors exhibited fast response and recovery, perfect reproducibility and good stability. The VO 2 (M) type sensor is more sensitive at high RH and can be used for high humidity detection. On the contrary, the VO 2 (B) type sensor has a higher sensitivity at low RH , and can be used for low humidity detection, which is difficult for humidity sensors based on many other semiconductor oxides.