压阻效应
悬臂梁
电压
材料科学
静电学
流离失所(心理学)
接触力
静电感应
非线性系统
激发态
声学
光电子学
激发
灵敏度(控制系统)
纳米技术
物理
电气工程
电子工程
经典力学
原子物理学
工程类
电极
心理学
量子力学
复合材料
心理治疗师
作者
Ali Shokuhfar,Payam Heydari,Salman Ebrahimi‐Nejad
出处
期刊:Sensors
[MDPI AG]
日期:2011-10-25
卷期号:11 (11): 10129-10142
被引量:8
摘要
This paper describes an electrostatic excited microcantilever sensor operating in static mode that is more sensitive than traditional microcantilevers. The proposed sensor comprises a simple microcantilever with electrostatic excitation ability and an optical or piezoresistive detector. Initially the microcantilever is excited by electrostatic force to near pull-in voltage. The nonlinear behavior of the microcantilever in near pull-in voltage i.e., the inverse-square relation between displacement and electrostatic force provides a novel method for force amplification. In this situation, any external load applied to the sensor will be amplified by electrostatic force leading to more displacement. We prove that the proposed microcantilever sensor can be 2 to 100 orders more sensitive compared with traditional microcantilevers sensors of the same dimensions. The results for surface stress and the free-end point force load are discussed.
科研通智能强力驱动
Strongly Powered by AbleSci AI