The Modulation Effect of LPCVD-Si x N y Stoichiometry on 2-DEG Characteristic of UTB AlGaN/GaN Heterostructure

化学计量学 化学气相沉积 异质结 材料科学 金属有机气相外延 钝化 分析化学(期刊) 光电子学 纳米技术 化学 物理化学 图层(电子) 有机化学 外延
作者
Liyang Zhu,Qi Zhou,Kuangli Chen,Wei Gao,Yong Cai,Kai Cheng,Zhaoji Li,Chao Zhang
出处
期刊:IEEE Transactions on Electron Devices [Institute of Electrical and Electronics Engineers]
卷期号:69 (9): 4828-4834 被引量:3
标识
DOI:10.1109/ted.2022.3188609
摘要

In this work, the impact of low-pressure chemical vapor deposition (LPCVD)-Si x N y stoichiometry on 2-D electron gas (2-DEG) transport characteristics of the AlGaN (3.9 nm)/GaN heterostructure and the underlying mechanism of increased 2-DEG density are studied, which reveals a new perspective of improving AlGaN/GaN performance by dielectric engineering. Among the AlGaN/GaN passivated by the LPCVD-Si x N y with tailored stoichiometry, the 2-DEG density and mobility in the Si-rich sample were significantly improved by 25% and 16.3% compared with the N-rich sample, respectively. Accordingly, 30% reduction in sheet resistance of AlGaN/GaN heterostructure is obtained. The potentially strained-induced enhancement of piezoelectric polarization and corresponding 2-DEG variation by the Si x N y passivation layer was excluded by the negligible change in Raman spectra among the different samples. Alternatively, the X-ray photoelectron spectroscopy (XPS) showed that the varied stoichiometry of the Si x N y enables a discernible modulation effect of heterostructure energy-band. The reduced surface potential in the sample passivated by Si-rich Si x N y attributes to the pronounced Ga dangling bonds (DBs) at the LPCVD-Si x N y /AlGaN interfaces, which provides the near-conduction band (NCB) states and leads to enhanced 2-DEG accumulation.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
大幅提高文件上传限制,最高150M (2024-4-1)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
SciGPT应助科研通管家采纳,获得30
刚刚
刚刚
HEIKU应助科研通管家采纳,获得10
刚刚
whatever应助科研通管家采纳,获得30
刚刚
HEIKU应助科研通管家采纳,获得10
刚刚
replay完成签到,获得积分10
刚刚
HEIKU应助科研通管家采纳,获得10
刚刚
iNk应助科研通管家采纳,获得10
1秒前
HEIKU应助科研通管家采纳,获得10
1秒前
1秒前
早发论文应助科研通管家采纳,获得10
1秒前
HEIKU应助科研通管家采纳,获得10
1秒前
彭于晏应助科研通管家采纳,获得10
1秒前
1秒前
1秒前
1秒前
1秒前
1秒前
1秒前
iNk应助科研通管家采纳,获得10
1秒前
CodeCraft应助科研通管家采纳,获得10
1秒前
xiaotaiyang发布了新的文献求助10
3秒前
西柚完成签到,获得积分10
3秒前
ll完成签到 ,获得积分10
4秒前
JD.发布了新的文献求助10
4秒前
深情安青应助三杠采纳,获得10
5秒前
少十七完成签到,获得积分10
5秒前
寒冷的寒梦完成签到,获得积分10
7秒前
7秒前
香蕉觅云应助shifeng_zai采纳,获得10
8秒前
Wjh123456完成签到,获得积分10
8秒前
小苏打完成签到,获得积分10
9秒前
小young完成签到 ,获得积分10
9秒前
Ooops完成签到,获得积分10
9秒前
遇见飞儿完成签到,获得积分0
9秒前
JD.完成签到,获得积分20
10秒前
w王w完成签到,获得积分10
10秒前
10秒前
zzz完成签到 ,获得积分10
10秒前
清风完成签到 ,获得积分10
11秒前
高分求助中
Evolution 10000
ISSN 2159-8274 EISSN 2159-8290 1000
Becoming: An Introduction to Jung's Concept of Individuation 600
Ore genesis in the Zambian Copperbelt with particular reference to the northern sector of the Chambishi basin 500
A new species of Coccus (Homoptera: Coccoidea) from Malawi 500
A new species of Velataspis (Hemiptera Coccoidea Diaspididae) from tea in Assam 500
PraxisRatgeber: Mantiden: Faszinierende Lauerjäger 500
热门求助领域 (近24小时)
化学 医学 生物 材料科学 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 基因 遗传学 催化作用 物理化学 免疫学 量子力学 细胞生物学
热门帖子
关注 科研通微信公众号,转发送积分 3162599
求助须知:如何正确求助?哪些是违规求助? 2813541
关于积分的说明 7900687
捐赠科研通 2473052
什么是DOI,文献DOI怎么找? 1316652
科研通“疑难数据库(出版商)”最低求助积分说明 631452
版权声明 602175