闪存
俘获
非易失性存储器
闪光灯(摄影)
光电子学
电气工程
电荷(物理)
EPROM
材料科学
频道(广播)
电荷陷阱闪光灯
计算机科学
逻辑门
物理
工程类
计算机硬件
光学
与非门
生态学
生物
量子力学
作者
Zong-Hao Ye,Kuei‐Shu Chang‐Liao,Li-Jung Liu,Jya‐Wei Cheng,Hsin-Kai Fang
出处
期刊:IEEE Electron Device Letters
[Institute of Electrical and Electronics Engineers]
日期:2015-12-01
卷期号:36 (12): 1314-1317
被引量:7
标识
DOI:10.1109/led.2015.2495344
摘要
Charge-trapping (CT) flash memory devices with Ge channel are studied for the first time. The operation characteristics of Ge-channel devices with different interfacial layers (IL), including GeO2, GeON, and AlON, are investigated. The programming/erasing speeds of devices with Ge channel can be significantly improved as compared with those with Si or SiGe channel. The retention properties of Ge-channel CT flash devices are much enhanced with a stacked tunneling layer formed by the low-temperature processes. However, the endurance characteristics of Ge-channel devices need improvement as compared with those of Si-channel devices. This may be resolved by a high-quality IL formed with an electron cyclotron resonance system and passivated with a H2 treatment.
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