Research on effect of seed crystal on piezoelectric effect characteristics in quartz wafer

薄脆饼 压电 石英 材料科学 Crystal(编程语言) 复合材料 光电子学 计算机科学 程序设计语言
作者
Jun Zhang,Yu Han,Zongjin Ren,Jun Shao,Bing Wang,Zhenyuan Jia
出处
期刊:Australian journal of mechanical engineering [Informa]
卷期号:20 (3): 769-780
标识
DOI:10.1080/14484846.2020.1748970
摘要

A multi-component measurement system centred on piezoelectric force sensor is an important mechanical measurement device, in which the piezoelectric sensor is mainly composed of force-sensitive components. The force-electric conversion performance of quartz wafer containing seed crystal and quartz crystal wafers is the main issue of the research in this paper. In the way of microscopic imaging and X-ray diffraction spectrum analysis, based on macroscopic physical properties of crystals, the theoretical basis of piezoelectric effects and the Neumann principle of elastic mechanics, both kinds of crystals have the same matrix of positive piezoelectric effects. Through static and continuous loading tests on quartz wafer containing seed crystal and ordinary quartz wafer, the maximum deviation of the electric charge, respectively, generated by X0° and Y0°cut type seed crystal wafers and ordinary quartz wafer in the static test under the same vector force loading is finally obtained, both seed-containing wafer and ordinary quartz wafer have excellent linearity. In continuous loading test, seed-containing wafer also has good continuous loading performance and can maintain a stable charge output under quasi-static input. Therefore, it is concluded that seed crystal wafers can also be used for actual testing.

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