材料科学
复合材料
造型(装饰)
扇出
填料(材料)
薄脆饼
聚合物
集成电路封装
晶圆级封装
电子包装
转移模塑
集成电路
模具
光电子学
标识
DOI:10.1109/ectc32696.2021.00126
摘要
Build-up process is a highly effective for high-density integration of printed circuit boards. Ajinomoto Build-up Film® (ABF) has become world-wide used insulation build-up material for manufacturing IC package substrates with Semi-Additive Process (SAP) due to their good resin flow, insulation reliability, thickness uniformity, and SAP applicability. As the recent growth of Fan-Out (FO) type packaging technology from its cost advantage and integration benefit, we developed small-sized filler loaded ABF (Nano filler ABF) as a redistribution layer material, LE series as a film type molding compound, and MI series as a liquid type molding compound. Using Nano filler ABF, we demonstrated 2um/2um line and space Cu patterning and Φ5 um laser via interlayer connection. LE and MI performed quite low warpage on both of 12-inch wafer and large size panel due to low CTE, low Young's modulus, high Tg, and consisting of special polymer.
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