PULL-IN STABILITY OF A FRACTAL MEMS SYSTEM AND ITS PULL-IN PLATEAU

The pull-in instability is the inherent property of a micro-electromechanical system (MEMS) when the voltage is larger than its threshold value. Recently, a fractal MEMS system was proposed to overcome the pull-in instability with great success, and it has opened a total new path for the so-called pull-in stability. This paper suggests a pull-in plateau, a novel concept for qualifying the pull-in stability. The plateau’s basic properties are elucidated, and the effect of the fractal dimensions on the plateau width is elucidated, and the paper concludes that there exists a critical condition for an ever pull-in stability when both the acceleration and the speed of the system equal zero.