材料科学
涂层
腐蚀
摩擦学
复式(建筑)
溅射沉积
冶金
离子镀
图层(电子)
X射线光电子能谱
扫描电子显微镜
溅射
复合材料
薄膜
化学工程
纳米技术
化学
工程类
DNA
生物化学
作者
Xiaoyan Guan,Haorong Shi,Meiyan Zhao,Guangan Zhang,Yiwei Cao
出处
期刊:Journal of vacuum science & technology
[American Institute of Physics]
日期:2023-03-01
卷期号:41 (2): 023103-023103
摘要
Owing to growth defects, the CrN coating–substrate system may suffer from severe corrosion and wear attack in a marine environment, which limits the coating protection against the 316L substrate. To improve the efficiency, a new approach of fabricating Al 2 O 3 /CrN duplex coatings to achieve excellent corrosion and wear performances was provided by sealing the growth defects and extending the deposition time of the CrN layer. The Al 2 O 3 /CrN duplex coatings were obtained by multi-arc ion plating system sputter CrN layers combined with sequential atomic layer deposition Al 2 O 3 layers. The morphology and structure of the as-deposited coating were investigated by scanning electron microscopy and x-ray photoelectron spectroscopy. The corrosion performances and tribological properties of the Al 2 O 3 /CrN duplex coatings in a seawater environment were investigated. The results showed that the density of the duplex coating decreases as the CrN layer thickness increases. The Al 2 O 3 /CrN duplex coatings with a suitable CrN layer thickness exhibited superior corrosion resistance in a seawater environment, which may be ascribed to the Al 2 O 3 layer filling or sealing the partial growth defects of the CrN layer and playing a good barrier role to prevent the infiltration and penetration of corrosive media. Furthermore, the wear rate of the Al 2 O 3 /CrN duplex coating was reduced more than 30% compared to the single CrN coating of the same thickness. The good wear resistance of Al 2 O 3 /CrN duplex coatings was attributed to the synergistic effect of the dense structure, high wear resistance of the Al 2 O 3 layer, and the supporting effect of the CrN layer as well as the formation of the lubricating component of CaCO 3 and Mg(OH) 2 during wear progress.
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