亲爱的研友该休息了!由于当前在线用户较少,发布求助请尽量完整地填写文献信息,科研通机器人24小时在线,伴您度过漫漫科研夜!身体可是革命的本钱,早点休息,好梦!

Thermal Atomic Layer Etching of Gold Using Sulfuryl Chloride for Chlorination and Triethylphosphine for Ligand Addition

硫酰氯 配体(生物化学) 图层(电子) 氯化物 化学 蚀刻(微加工) 无机化学 有机化学 生物化学 受体
作者
Jonathan L. Partridge,Jessica A. Murdzek,Virginia L. Johnson,Andrew S. Cavanagh,Sandeep Sharma,Steven M. George
出处
期刊:Chemistry of Materials [American Chemical Society]
卷期号:36 (10): 5149-5159 被引量:1
标识
DOI:10.1021/acs.chemmater.4c00485
摘要

Thermal atomic layer etching (ALE) of gold was achieved using sequential chlorination and ligand-addition reactions. This two-step process first chlorinated gold using sulfuryl chloride (SO2Cl2) to form gold chloride. Subsequently, ligand addition to the gold chloride was performed using triethylphosphine (PEt3) to yield a volatile gold etch product. Quartz crystal microbalance measurements on cubic crystalline gold films showed etching at temperatures from 75 to 175 °C. The most consistent etch rate was 0.44 ± 0.16 Å/cycle at 150 °C. A mass increase was observed during each SO2Cl2 exposure when forming the gold chloride. A mass loss was then monitored during each PEt3 dose when ligand addition yielded a volatile etch product. In situ quadrupole mass spectrometry (QMS) studies on Au nanopowder at 150 °C showed the production of AuClPEt3 as the dominant Au-containing etch product during PEt3 exposures. Time-dependent QMS studies also observed the AuClPEt3+ ion intensity peaking at the beginning of each PEt3 exposure. The AuClPEt3+ ion intensity then decreased as the PEt3+ ion intensity remained constant. This behavior indicates a self-limiting ligand-addition reaction. X-ray photoelectron spectroscopy on these Au nanopowders showed evidence for AuClPEt3 on the surface of the Au nanopowder when the final exposure was PEt3. Transmission electron microscopy analysis revealed that Au ALE did not roughen the crystalline Au nanoparticles. Powder X-ray diffraction measurements also showed narrower diffraction peaks after Au ALE on Au nanoparticles that were consistent with larger Au nanoparticles. This sintering effect may be caused by Au redistribution resulting from the disproportionation of the AuCl surface species. Using the same alternating exposures of SO2Cl2 and PEt3, Cu and Ni nanopowders were also etched at 150 °C. Cu formed a volatile Cu2Cl2(PEt3)2 dimer during PEt3 exposures at 150 °C. Likewise, Ni formed volatile NiCl2(PEt3)2 during PEt3 exposures at 150 °C. Gibbs free energy changes from ab inito calculations support these etch product observations and offer a thermodynamic explanation for the formation of a copper dimer. These studies illustrate that sequential chlorination and ligand-addition reactions can provide a useful ALE pathway for gold and other metals.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
PDF的下载单位、IP信息已删除 (2025-6-4)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
隐形曼青应助科研通管家采纳,获得10
5秒前
科研通AI2S应助科研通管家采纳,获得10
5秒前
老石完成签到 ,获得积分10
1分钟前
1分钟前
CipherSage应助科研通管家采纳,获得10
2分钟前
彭于晏应助科研通管家采纳,获得10
2分钟前
科研通AI2S应助科研通管家采纳,获得10
2分钟前
火星上向珊完成签到,获得积分10
2分钟前
2分钟前
wdxx发布了新的文献求助30
2分钟前
liufan完成签到 ,获得积分10
3分钟前
lmplzzp完成签到,获得积分10
3分钟前
橙子味的邱憨憨完成签到 ,获得积分10
3分钟前
杪夏二八完成签到 ,获得积分10
3分钟前
wdxx完成签到,获得积分10
3分钟前
649981108发布了新的文献求助10
4分钟前
4分钟前
649981108完成签到,获得积分10
4分钟前
4分钟前
研友_892kOL完成签到,获得积分10
4分钟前
脑洞疼应助李小猫采纳,获得10
4分钟前
5分钟前
李小猫完成签到,获得积分10
5分钟前
5分钟前
李小猫发布了新的文献求助10
5分钟前
5分钟前
5分钟前
6分钟前
7分钟前
8分钟前
Tiger完成签到,获得积分10
8分钟前
8分钟前
8分钟前
Ma发布了新的文献求助10
8分钟前
8分钟前
8分钟前
科研通AI5应助Ma采纳,获得10
8分钟前
彼岸花开发布了新的文献求助10
9分钟前
9分钟前
易四夕发布了新的文献求助10
9分钟前
高分求助中
A new approach to the extrapolation of accelerated life test data 1000
Cognitive Neuroscience: The Biology of the Mind 1000
Technical Brochure TB 814: LPIT applications in HV gas insulated switchgear 1000
Immigrant Incorporation in East Asian Democracies 600
Nucleophilic substitution in azasydnone-modified dinitroanisoles 500
不知道标题是什么 500
A Preliminary Study on Correlation Between Independent Components of Facial Thermal Images and Subjective Assessment of Chronic Stress 500
热门求助领域 (近24小时)
化学 材料科学 医学 生物 工程类 有机化学 生物化学 物理 内科学 纳米技术 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 冶金 细胞生物学 免疫学
热门帖子
关注 科研通微信公众号,转发送积分 3968504
求助须知:如何正确求助?哪些是违规求助? 3513278
关于积分的说明 11167214
捐赠科研通 3248660
什么是DOI,文献DOI怎么找? 1794386
邀请新用户注册赠送积分活动 875030
科研通“疑难数据库(出版商)”最低求助积分说明 804638