Ultra-small size Micro-LEDs with enhanced efficiency for near-eye display

Micro Light-emitting diodes (Micro-LEDs) array for near-eye display with pixel dimensions of 1.3×1.5 μm ² were fabricated, corresponding to a resolution of 10040 pixels per inch (PPI). Optimized N ₂ O plasma treatment process was deployed to minimize the sidewall non-radiative recombination and increase radiative efficiency of Micro-LEDs. The experimental results demonstrated a significant improvement in external quantum efficiency (EQE) of blue and green Micro-LEDs, with peak EQE of 22.3% and 19.3%, respectively. High brightness and optical power density was acquired exceeding 5×10 ⁷ nits and 7×10 ⁴ mW/cm ² . And excellent wavelength and efficiency stability were demonstrated with respect to the temperature. These results illustrate an immense potential of Micro-LEDs for high resolution near-eye display applications.