铁电性
材料科学
平版印刷术
纳米压印光刻
纳米技术
薄膜
极化
极化(电化学)
光刻
光电子学
电介质
制作
化学
医学
替代医学
物理化学
病理
作者
Dongbo Li,Dawn A. Bonnell
出处
期刊:Annual Review of Materials Research
[Annual Reviews]
日期:2008-04-07
卷期号:38 (1): 351-368
被引量:88
标识
DOI:10.1146/annurev.matsci.37.052506.084303
摘要
Patterning ferroelectric domains to engineer devices is a relatively recent phenomenon. It is practiced on nonlinear optical materials to make micrometer-sized devices and on perovskite-based thin crystals to progress toward memory devices. Such patterning forms the basis of lithographic processing of heterogeneous nanostructures on thin-film oxides and polymers. The fundamental aspects of polarization switching relevant to patterning are summarized, after which the most common methods of patterning ferroelectric compounds are reviewed, with an emphasis on poling mechanisms for each case. Issues related to the stability of domain patterns and limitations on the smallest domain size are discussed. Finally, lithography based on ferroelectric patterning is demonstrated for a number of complex systems.
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