金属有机气相外延
异质结
制作
材料科学
光电子学
纳米技术
外延
图层(电子)
医学
病理
替代医学
标识
DOI:10.1016/0022-0248(84)90436-6
摘要
A comparison is made of the suitability of MOCVD and MBE for application to the fabrication of heterojunction devices. The fundamental processes that control the growth, and the materials and device results achieved to data by each process are reviewed.
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