Thin-film Encapsulation of Organic Light Emitting Diode by Atomic Layer Deposition

Abstract：Organic light emitting diode (OLED)has the characteristics of lightness，thinness，portability，self-luminescence，low energy consumption，higher brightness，and flexible display etc. ， which can increase the added value of display products，so it has been widely concerned by scientific and industrial circles.However，the key organic materials in OLED devices are very sensitive to water vapor and oxygen in the air.If the device is exposed to air for a long time without protection，it will seriously affect the long-term performance of the device and shorten the life of the OLED.In addition to selecting appropriate transmission layer material and surface layer structure，and using interface engineering to improve the water and oxygen tolerance of materials，reliable encapsulation of the device is another effective means to isolate water vapor and oxygen corrosion in the air.Atomic