磺酸盐
光刻胶
化学
高分子化学
材料科学
有机化学
钠
图层（电子）
作者
Qixin Sun,Baicheng Feng,Zhendong Sun,R. S. H. LIU,Hongjiao Ding,Yan Jin
摘要
A total of six sulfonate polymeric nonionic photoacid generators (PAGs) have been synthesised and subjected to comprehensive characterization for their application in photoresist materials.
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