水听器
微电子机械系统
声学
材料科学
地质学
计算机科学
物理
光电子学
作者
Georgios Karamanis,Jon D. Anderson,Lalitha Parameswaran,James Vlahakis,Livia Racz,D. Freeman,Robert D. White
出处
期刊:Journal of the Acoustical Society of America
[Acoustical Society of America]
日期:2024-03-01
卷期号:155 (3_Supplement): A293-A293
摘要
MEMS hydrophones are of interest to provide a small form factor acoustic sensing capability in water. The majority of previous work on MEMS hydrophones (e.g., Bernstein 1997, Moon, 2010, Gu, 2018) use air backed diaphragms in order to provide increased sensitivity. However, this limits the operating depth of the device due to a reduction in the diaphragm burst pressure. In this work we investigate an architecture that has the potential to increase the operating depth by filling the backing cavity with a heavy fluid. We have designed architectures with multiple acoustic ports (Moon, 2010) and coupled piezoelectric diaphragms, in a bid to maintain sufficient sensitivity while incorporating the filling fluid. The sensing elements are Parylene coated, repackaged Vesper VM1000 aluminum nitride MEMS microphones. It was reported (Travaglione, 2018) that such a device can sense underwater sound, but characterization was limited. In our prototypes, the microphone die are co-packaged onto modified printed circuit boards which include the acoustic coupling elements and required preamplifiers. We report on computational predictions of sensitivity and resolution, and provide initial test results as part of our ongoing investigation. Support from OUSD (R&E) Innovation and Modernization Office.
科研通智能强力驱动
Strongly Powered by AbleSci AI