铌酸锂
极化
材料科学
光子学
光电子学
薄脆饼
非线性系统
平版印刷术
准相位匹配
光学
非线性光学
电子工程
激光器
铁电性
工程类
物理
量子力学
电介质
作者
Xiaoting Li,Haochuan Li,Zhenzheng Wang,Zhaoxi Chen,Fei Ma,Ke Zhang,Wenzhao Sun,Cheng Wang
出处
期刊:Cornell University - arXiv
日期:2023-01-01
被引量:3
标识
DOI:10.48550/arxiv.2312.09568
摘要
Thin-film periodically poled lithium niobate (TF-PPLN) devices have recently gained prominence for efficient wavelength conversion processes in both classical and quantum applications. However, the patterning and poling of TF-PPLN devices today are mostly performed at chip scales, presenting a significant bottleneck for future large-scale nonlinear photonic systems that require the integration of multiple nonlinear components with consistent performance and low cost. Here, we take a pivotal step towards this goal by developing a wafer-scale TF-PPLN nonlinear photonic platform, leveraging ultraviolet stepper lithography and an automated poling process. To address the inhomogeneous broadening of the quasi-phase matching (QPM) spectrum induced by film thickness variations across the wafer, we propose and demonstrate segmented thermal optic tuning modules that can precisely adjust and align the QPM peak wavelengths in each section. \hl{Using the segmented micro-heaters, we show the successful realignment of inhomogeneously broadened multi-peak QPM spectra with up to 57$\%$ enhancement of conversion efficiency. We achieve a high normalized conversion efficiency of 3802$\%$W$^{-1}$cm$^{-2}$ in a 6 mm long PPLN waveguide, recovering 84$\%$ of the theoretically predicted efficiency in this device.} The advanced fabrication techniques and segmented tuning architectures presented herein pave the way for wafer-scale integration of complex functional nonlinear photonic circuits with applications in quantum information processing, precision sensing and metrology, and low-noise-figure optical signal amplification.
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