热电堆
热电效应
热导率
材料科学
薄脆饼
热的
热电材料
光电子学
热导率测量
电子工程
复合材料
光学
工程类
热力学
物理
红外线的
作者
Qi-Wen Fan,Jianyu Fu,Peng Huang,Yihong Lu,Xiaolei Wang,Dapeng Chen
标识
DOI:10.1088/1361-6439/acb958
摘要
Abstract Thermopile sensors have a wide range of applications in consumer and industry. Thermopile is the key component of thermopile sensors, and thermal conductivity is a basic thermal parameter of thermopile. Extracting the thermal conductivity of thermoelectric materials in thermopile sensors is of great importance. In this work, wafer acceptable test structures that fabricated along with thermopile sensors are presented. They could guarantee the measured materials are identical to those used in thermopile sensors. The test results are consistent with the reported values, and the validity of structures is verified. This method has the advantages of on-line extraction over a wide temperature range, and simultaneous extraction of thermal conductivity of connecting wire.
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