红外线的
硅
材料科学
光电子学
领域(数学)
光学
纳米技术
物理
数学
纯数学
作者
Hung‐I Lin,Jeffrey A. Geldmeier,Erwan Baleine,Fan Yang,Sensong An,Ying Pan,Clara Rivero‐Baleine,Tian Gu,Juejun Hu
出处
期刊:ACS Photonics
[American Chemical Society]
日期:2024-04-09
卷期号:11 (5): 1943-1949
标识
DOI:10.1021/acsphotonics.4c00013
摘要
Long-wave infrared (LWIR, 8–12 μm wavelengths) spectral spectra are of vital importance to thermal imaging. Conventional LWIR optics made from single-crystalline Ge and chalcogenide glasses are bulky and fragile. The challenge is exacerbated for wide-field-of-view (FOV) optics, which traditionally mandates multiple cascaded elements that severely add to complexity and cost. Here, we designed and experimentally realized a LWIR metalens platform based on bulk Si wafers featuring 140° FOV. The metalenses, which have diameters exceeding 4 cm, were fabricated using a scalable wafer-level process involving photolithography and deep reactive ion etching. Using a metalens-integrated focal plane array, we further demonstrated wide-angle thermal imaging.
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