Lithographically Integrated Microsupercapacitors for Compact, High Performance, and Designable Energy Circuits

A wafer-scale integrated energy device circuit (IEDC) consisting of electrochemically isolated microsupercapacitor cells that could be connected in parallel and in series, as well as in arbitrarily arrangements. Such an IEDC possesses the same capacitance, operational voltage, and order relaxation time constant, although it is 1/1000th-times smaller than an equivalent Al electrolytic capacitor.