Wesley D. Sacher,Yiding Lin,Hong Chen,Saeed Sharif Azadeh,Zheng Yong,Xianshu Luo,Hongyao Chua,Jason C. C. Mak,Alperen Gövdeli,Ankita Sharma,Jared C. Mikkelsen,Xin Mu,Andrei Stalmashonak,Guo‐Qiang Lo,Joyce K. S. Poon
标识
DOI：10.1364/ofc.2023.tu3c.5
摘要
We present a foundry-fabricated monolithically integrated photonics platform for the visible spectrum (λ=445–640nm) with two layers of silicon nitride waveguides, silicon photodiodes, efficient undercut thermo-optic phase shifters, in situ trimming, and electro-thermal MEMS devices.
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