转印
氮化硅
氮化物
硅
计算机科学
纳米技术
材料科学
光电子学
图层(电子)
复合材料
作者
Maximlien Billet,Tom Vanackere,Tom Vandekerckhove,Margot Niels,Luis Reis,D. Maes,Max Kiewet,Konstantinos Akritidis,Stijn Cuyvers,Stijn Poelman,Tom Reep,Valeria Bonito Oliva,François Léo,Günther Roelkens,Bart Kuyken
摘要
Photonic integrated circuits enable the miniaturization of photonic systems by integrating key optical functions on a chip. While CMOS compatible silicon and silicon nitride are very efficient platforms for passive circuits, they lack active key functionalities for the realization of a full system on a chip. A versatile solution is to use micro-transfer printing for heterogeneous integration of active devices on such platforms. Here we present the recent advances of micro-transfer printing on silicon nitride and discuss the remaining challenges.
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