All solid-state 193nm source with 5mJ pulse energy

Using CBO crystal as the final mixing nonlinear optical crystal, we generated 5mJ/pulse at 193nm. The high pulse energy at 193nm is a result of several factors. The efficiency of CBO is about three times better than that of LBO, and an order of magnitude better than BBO. Novel designs in 4^th and 5^th harmonic generators using readily available BBO crystals allow the stable, efficient and repetitive generation of high pulse energy at the 5^th harmonic of 1064nm.