Impedance matching is implemented to stabilize an atmospheric-pressure waveguide-based N 2 -Ar plasma torch with the aid of the use of swirl gas. Optical emission spectroscopy is employed to diagnose the plasma torch with respect to the population of the electronic state N +2 (B 2 Σ +u ) and N 2 (B 3 Π g ) versus the absorbed power and the ratio of N 2 component in the Ar-N 2 mixture by the measurement of the emission of intensity. The qualitative discussion based on the reaction routes is delivered to interpret the experimental results well.