Multi-junction VCSEL arrays with high performance and reliability for mobile and automotive 3D sensing applications

Multiple active regions connected in series with low-resistance tunnel junctions enable a new class of high-brightness VCSEL arrays that enhance the capability for 3DS sensing applications. Multiple photons can be generated by each injected electron which proportionally increases the power and brightness of the VCSEL with additional benefit of reduced inductance penalty at the same output power. Two and three junction VCSEL arrays have been demonstrated for mobile Time-of-Flight applications with +30% module efficiency. Five junction VCSEL arrays reach 100W at 25A and 400W at 100A for automotive LIDAR applications. Preliminary reliability data appears promising.